Patent Assignment
Reel/Frame 035789/0468
Assignment of Assignor's Interest
Recorded: 2015-06-04
Pages: 8
Assignors
VUKKADALA, PRADEEP
Executed: 2015-05-28
VEERARAGHAVAN, SATHISH
Executed: 2015-05-28
DEY, SOHAM
Executed: 2015-05-28
SINHA, JAYDEEP
Executed: 2015-06-02
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Predicting and Controlling Critical Dimension Issues and Pattern Defectivity in Wafers Using Interferometry