Patent Assignment
Reel/Frame 035798/0681
Assignment of Assignor's Interest
Recorded: 2015-06-07
Pages: 3
Assignor
MIYAZAKI, TADAKI
Executed: 2015-01-05
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Detection Apparatus, Detection Method, and Lithography Apparatus