Patent Assignment
Reel/Frame 035801/0001
Assignment of Assignor's Interest
Recorded: 2015-06-08
Pages: 4
Assignors
FU, XINYU
Executed: 2015-05-22
GANDIKOTA, SRINIVAS
Executed: 2015-05-22
CHANG, MEI
Executed: 2015-05-28
GANGULI, SESHADRI
Executed: 2015-05-22
JIAN, GUOQIANG
Executed: 2015-05-28
YANG, YIXIONG
Executed: 2015-05-28
BANTHIA, VIKASH
Executed: 2015-05-22
BAKKE, JONATHAN
Executed: 2015-05-22
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods for Etching via Atomic Layer Deposition (Ald) Cycles