Patent Assignment
Reel/Frame 035803/0693
Assignment of Assignor's Interest
Recorded: 2015-06-08
Pages: 6
Assignors
FUKUSHIMA, MASAHIRO
Executed: 2015-04-27
DOMON, DAISUKE
Executed: 2015-04-27
MASUNAGA, KEIICHI
Executed: 2015-04-27
WATANABE, SATOSHI
Executed: 2015-04-27
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Chemically Amplified Resist Composition and Pattern Forming Process