Patent Assignment
Reel/Frame 035823/0087
Assignment of Assignor's Interest
Recorded: 2015-06-11
Pages: 4
Assignors
SHIH, CHIH-TSUNG
Executed: 2015-05-28
YU, SHINN-SHENG
Executed: 2015-05-28
CHEN, JENG-HORNG
Executed: 2015-05-28
YEN, ANTHONY
Executed: 2015-05-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Euv Mask and Manufacturing Method by Using the Same