Patent Assignment
Reel/Frame 035830/0762
Assignment of Assignor's Interest
Recorded: 2015-06-12
Pages: 3
Assignor
ISHIBASHI, TOMOATSU
Executed: 2015-04-02
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Cleaning Apparatus