Patent Assignment
Reel/Frame 035846/0409
Assignment of Assignor's Interest
Recorded: 2015-06-16
Pages: 5
Assignors
HUDSON, ERIC A.
Executed: 2015-05-20
HAUSMANN, DENNIS M.
Executed: 2015-05-26
BRIGGS, JOSEPH SCOTT
Executed: 2015-05-20
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Technique to Deposit Sidewall Passivation for High Aspect Ratio Cylinder Etch