Patent Assignment
Reel/Frame 035854/0540
Assignment of Assignor's Interest
Recorded: 2015-06-17
Pages: 2
Assignors
GUPTA, RAHUL
Executed: 2014-06-13
PALLEM, VENKATESWARA R.
Executed: 2014-06-17
JURCIK, BENJAMIN J., JR.
Executed: 2014-06-30
Assignee
AMERICAN AIR LIQUIDE, INC.
46409 LANDING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer or Cyclic Plasma Etching Chemistries and Processes