Patent Assignment
Reel/Frame 035873/0541
Assignment of Assignor's Interest
Recorded: 2015-06-22
Pages: 6
Assignors
YAMADA, TAKUMI
Executed: 2015-05-18
HAYANO, TAKANORI
Executed: 2015-05-08
IIJIMA, TATSUHIKO
Executed: 2015-05-18
SATO, YUUSUKE
Executed: 2015-05-25
Assignee
NUFLARE TECHNOLOGY INC.
8-1, SHIN SUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA-KEN, JAPAN
Covered Property
(1)
Vapor Phase Growth Method of Growing a Film on a Substrate While Heating the Substrate with a Heating Unit