Patent Assignment
Reel/Frame 035884/0254
Assignment of Assignor's Interest
Recorded: 2015-06-23
Pages: 5
Assignors
CHOU, CHEN CHENG
Executed: 2015-05-08
SUN, CHUNG-REN
Executed: 2015-05-08
WU, CHII-MING
Executed: 2015-05-08
WU, CHENG-TA
Executed: 2015-05-08
LIN, TZU-KAI
Executed: 2015-05-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Tilt Implantation for Sti Formation in Finfet Structures