Patent Assignment
Reel/Frame 035884/0638
Assignment of Assignor's Interest
Recorded: 2015-06-23
Pages: 6
Assignors
SAPIENS, NOAM
Executed: 2015-05-18
PETERLINZ, KEVIN A.
Executed: 2015-06-10
BUETTNER, ALEXANDER
Executed: 2015-05-11
PURRUCKER, KERSTIN
Executed: 2015-05-13
SHCHEGROV, ANDREI V.
Executed: 2015-06-11
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Optical Metrology With Small Illumination Spot Size