Patent Assignment
Reel/Frame 035907/0036
Assignment of Assignor's Interest
Recorded: 2015-06-25
Pages: 5
Assignor
FUKAZAWA, KAZUHIKO
Executed: 2015-05-25
Assignee
NIKON CORPORATION
15-3, KONAN 2-CHOME, MINATO-KU, TOKYO, 108-6290, JAPAN
Covered Property
(1)
Evaluation Method and Device, Processing Method, and Exposure System