Patent Assignment
Reel/Frame 035908/0550
Assignment of Assignor's Interest
Recorded: 2015-06-25
Pages: 6
Assignors
SHIMANE, YOSHIMITSU
Executed: 2015-06-03
UCHINO, SATOSHI
Executed: 2015-06-13
AKIYAMA, SUSUMU
Executed: 2015-06-03
MATSUO, KAZUAKI
Executed: 2015-06-03
YAMAGUCHI, NOBUO
Executed: 2015-06-03
Assignee
CANON ANELVA CORPORATION
2-5-1, KURIGI, ASAO-KU, KAWASAKI-SHI, KANAGAWA-KEN, JAPAN
Covered Property
(1)
Substrate Processing Apparatus