Patent Assignment
Reel/Frame 035914/0445
Assignment of Assignor's Interest
Recorded: 2015-06-26
Pages: 5
Assignors
FUNAKUBO, TAKAO
Executed: 2015-06-19
HAGA, HIROFUMI
Executed: 2015-06-19
KOZUKA, SHINICHI
Executed: 2015-06-19
OZAWA, WATARU
Executed: 2015-06-22
SAKAMOTO, AKIHIRO
Executed: 2015-06-22
TANIGUCHI, NAOKI
Executed: 2015-06-22
TSUJIMOTO, HIROSHI
Executed: 2015-06-19
ONO, KUMIKO
Executed: 2015-06-19
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method