Patent Assignment
Reel/Frame 035915/0016
Assignment of Assignor's Interest
Recorded: 2015-06-26
Pages: 5
Assignors
KOYAMA, KAZUYA
Executed: 2015-06-09
KIYOSE, HIROMI
Executed: 2015-06-09
MATSUKI, KATSUFUMI
Executed: 2015-06-09
TAKAHASHI, SHUHEI
Executed: 2015-06-09
NISHIMURA, HIDEKI
Executed: 2015-06-09
UNO, TAKASHI
Executed: 2015-06-09
MARUYAMA, HIROTAKA
Executed: 2015-06-12
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Liquid Treatment Apparatus, Method of Cleaning Substrate Liquid Treatment Apparatus and Non-Transitory Storage Medium