Patent Assignment
Reel/Frame 035916/0072
Assignment of Assignor's Interest
Recorded: 2015-06-26
Pages: 6
Assignors
SHINOZAKI, HIROYUKI
Executed: 2015-05-18
AONO, HIROSHI
Executed: 2015-05-21
SONE, TADAKAZU
Executed: 2015-05-18
SHINKAI, KENJI
Executed: 2015-05-21
AIZAWA, HIDEO
Executed: 2015-05-19
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Polishing Apparatus