Patent Assignment
Reel/Frame 035917/0345
Assignment of Assignor's Interest
Recorded: 2015-06-26
Pages: 6
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME,, CHIYODA-KU,, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Cleaning Method, Manufacturing Method of Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.