Patent Assignment
Reel/Frame 035924/0292
Assignment of Assignor's Interest
Recorded: 2015-06-29
Pages: 5
Assignor
HIROKI, TSUTOMU
Executed: 2015-06-22
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
System Including Temperature-Controllable Stage, Semiconductor Manufacturing Equipment and Stage Temperature Control Method