Patent Assignment
Reel/Frame 035927/0001
Assignment of Assignor's Interest
Recorded: 2015-06-18
Pages: 7
Assignors
MOUNTSIER, THOMAS WELLER
Executed: 2015-06-11
WU, HUI-JUNG
Executed: 2015-06-09
VARADARAJAN, BHADRI N.
Executed: 2015-06-09
SHANKAR, NAGRAJ
Executed: 2015-06-16
LEE, WILLIAM T.
Executed: 2015-06-10
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Selective Formation of Dielectric Barriers for Metal Interconnects in Semiconductor Devices