Patent Assignment
Reel/Frame 035932/0264
Assignment of Assignor's Interest
Recorded: 2015-06-17
Pages: 11
Assignors
HANASHIMA, TAKEO
Executed: 2015-06-10
WANG, JIE
Executed: 2015-05-25
NODA, TAKAAKI
Executed: 2015-06-02
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.