Patent Assignment
Reel/Frame 035937/0167
Assignment of Assignor's Interest
Recorded: 2015-06-30
Pages: 3
Assignors
FUJIMURA, AKIRA
Executed: 2015-06-29
PEARMAN, RYAN
Executed: 2015-06-29
AADAMOV, ANATOLY
Executed: 2015-06-29
Assignee
D2S, INC.
4040 MOORPARK AVENUE, #250, SAN JOSE, CALIFORNIA, 95117
Covered Property
(1)
Method and System for Improving Critical Dimension Uniformity Using Shaped Beam Lithography