Patent Assignment
Reel/Frame 035941/0899
Assignment of Assignor's Interest
Recorded: 2015-06-30
Pages: 6
Assignors
KURITSYN, ALEXEY
Executed: 2015-06-16
LIU, YE
Executed: 2015-06-16
KHODYKIN, OLEG
Executed: 2015-06-23
KANOUFF, MICHAEL P.
Executed: 2015-06-18
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Properties
(2)
Apparatus and Methods for Optics Protection from Debris in Plasma-Based Light Source
Method and Apparatus to Protect Internal Optical Elements for LPP EUV Source
Application:
62/074,001 →