IP Library › Patent Application 62074001
Patent Application Provisional
App. No. 62/074,001 · Confirmation No. 7586

Method and Apparatus to Protect Internal Optical Elements for LPP EUV Source

Provisional Application Expired
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 Code Description Pages PDF
2014-11-18 APP.FILE.REC Filing Receipt 3 View
2014-11-01 TR.PROV Provisional Cover Sheet (SB16) 3 View
2014-11-01 SPEC Specification 4 View
2014-11-01 DRW Drawings-only black and white line drawings 2 View
2014-11-01 WFEE Fee Worksheet (SB06) 2 View
2014-11-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
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Quick Facts
App. No.
62/074,001
Filed
2014-11-01