Patent Assignment
Reel/Frame 035948/0064
Assignment of Assignor's Interest
Recorded: 2015-07-01
Pages: 6
Assignees
LAPIS SEMICONDUCTOR CO., LTD.
2-4-8 SHINYOKOHAMA, KOUHOKU-KU, YOKOHAMA, 222-8575, JAPAN
TOHOKU UNIVERSITY
2-1-1 KATAHIRA, AOBAKU, SENDAI-SHI, MIYAGI, 980-8577, JAPAN
Covered Property
(1)
Plasma Monitoring Method and Plasma Monitoring System