Patent Assignment
Reel/Frame 036013/0994
Assignment of Assignor's Interest
Recorded: 2015-07-07
Pages: 3
Assignors
KAGAWA, TADANOBU
Executed: 2015-04-09
YUMIYAMA, TOSHIO
Executed: 2015-04-10
KUROSE, TAKESHI
Executed: 2015-04-09
Assignee
SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
1-1, OSAKI 2-CHOME, SHINAGAWA-KU, TOKYO, 141-6025, JAPAN
Covered Property
(1)
Ion Implanter and Method of Controlling the Same