Patent Assignment
Reel/Frame 036023/0059
Assignment of Assignor's Interest
Recorded: 2015-07-08
Pages: 2
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
NO.8, LI-HSIN ROAD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300-77, TAIWAN
Covered Property
(1)
Method for Cleaning Plasma Processing Chamber and Substrate