Patent Assignment
Reel/Frame 036045/0748
Assignment of Assignor's Interest
Recorded: 2015-07-09
Pages: 3
Assignors
SASAGAWA, NORIHIKO
Executed: 2015-06-24
INADA, HIROICHI
Executed: 2015-06-30
HAMADA, MASAHITO
Executed: 2015-07-01
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Chemical Liquid Discharge Mechanism, Liquid Processing Apparatus, Chemical Liquid Discharge Method, and Storage Medium