Patent Assignment
Reel/Frame 036048/0326
Assignment of Assignor's Interest
Recorded: 2015-07-09
Pages: 6
Assignors
SHIMAMOTO, SATOSHI
Executed: 2014-02-17
HIROSE, YOSHIRO
Executed: 2014-02-17
SANO, ATSUSHI
Executed: 2014-02-17
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Method, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.