Patent Assignment
Reel/Frame 036057/0379
Assignment of Assignor's Interest
Recorded: 2015-07-10
Pages: 3
Assignors
HUANG, TSUNG-MIN
Executed: 2013-11-19
LEE, CHUNG-JU
Executed: 2013-11-19
WU, YUNG-HSU
Executed: 2013-11-19
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Spacer-Damage-Free Etching