Patent Assignment
Reel/Frame 036059/0812
Assignment of Assignor's Interest
Recorded: 2015-07-10
Pages: 7
Assignors
YUN, SEONG-JIN
Executed: 2015-04-11
KO, WOO-SEOK
Executed: 2015-07-07
YANG, YU-SIN
Executed: 2015-04-13
LEE, SANG-KIL
Executed: 2015-04-13
JUN, CHUNG-SAM
Executed: 2015-04-13
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 443-742, KOREA, REPUBLIC OF
Covered Property
(1)
Overlay Measuring Method and System, and Method of Manufacturing Semiconductor Device Using the Same