Patent Assignment
Reel/Frame 036068/0983
Assignment of Assignor's Interest
Recorded: 2015-07-13
Pages: 6
Assignors
KIM, GON-JUN
Executed: 2015-03-19
KIM, SAM HYUNGSAM
Executed: 2015-03-19
LEE, SANGHEON
Executed: 2015-03-19
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO, SUWON-SI, 443-742, KOREA, REPUBLIC OF
Covered Property
(1)
Method of Generating Plasma in Remote Plasma Source and Method of Fabricating Semiconductor Device Using the Same Method