Patent Assignment
Reel/Frame 036081/0805
Assignment of Assignor's Interest
Recorded: 2015-07-14
Pages: 6
Assignors
RANJAN, ALOK
Executed: 2015-07-07
WANG, MINGMEI
Executed: 2015-07-07
VENTZEK, PETER L.G.
Executed: 2015-07-07
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods for High Precision Etching of Substrates