Patent Assignment
Reel/Frame 036092/0674
Assignment of Assignor's Interest
Recorded: 2015-07-15
Pages: 7
Assignors
YANG, TSUNG-JEN
Executed: 2015-07-09
CHEN, CHENG-CHIEH
Executed: 2015-07-09
CHOU, HONG-HSING
Executed: 2015-07-09
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method for Monitoring Usage of a Physical Vapor Deposition (Pvd) Target with an Ultrasonic Transducer