Patent Assignment
Reel/Frame 036105/0704
Assignment of Assignor's Interest
Recorded: 2015-07-14
Pages: 4
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
System and Method for Producing an Exclusionary Buffer Gas Flow in an Euv Light Source