Patent Assignment
Reel/Frame 036109/0842
Assignment of Assignor's Interest
Recorded: 2015-07-16
Pages: 4
Assignors
ETO, HIDEO
Executed: 2015-07-03
ABE, MASANORI
Executed: 2015-07-07
SAITO, MAKOTO
Executed: 2015-07-07
Assignee
KABUSHIKI KAISHA TOSHIBA
1-1, SHIBAURA 1-CHOME, MINATO-KU, TOKYO, 105-8001, JAPAN
Covered Property
(1)
Upper Electrode, Edge Ring, and Plasma Processing Apparatus
Application:
14/800,938 →
Publication:
US 2016/0284522
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.