Patent Assignment
Reel/Frame 036120/0782
Assignment of Assignor's Interest
Recorded: 2015-07-17
Pages: 14
Assignors
ADEL, MICHAEL
Executed: 2008-07-20
FIELDEN, JOHN
Executed: 2008-05-22
WIDMANN, AMIR
Executed: 2008-05-23
ROBINSON, JOHN
Executed: 2008-05-23
CHOI, DONGSUB
Executed: 2008-05-22
Assignee
KLA TENCOR CORPORATION
1 TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Feedforward/Feedback Litho Process Control of Stress and Overlay