Patent Assignment
Reel/Frame 036137/0152
Assignment of Assignor's Interest
Recorded: 2015-07-20
Pages: 5
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONNGI-DO, 443-742, KOREA, REPUBLIC OF
Covered Property
(1)
Apparatus and System for Generating Extreme Ultraviolet Light and Method of Using the Same