Patent Assignment
Reel/Frame 036146/0820
Assignment of Assignor's Interest
Recorded: 2015-07-21
Pages: 6
Assignors
BA, XIAOLAN
Executed: 2015-05-12
HUMAYUN, RAASHINA
Executed: 2015-07-06
DANEK, MICHAL
Executed: 2015-05-12
SCHLOSS, LAWRENCE
Executed: 2015-05-15
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Deposition of Low Fluorine Tungsten by Sequential Cvd Process