Patent Assignment
Reel/Frame 036152/0104
Assignment of Assignor's Interest
Recorded: 2015-07-22
Pages: 2
Assignor
SHAIKH, FAYAZ
Executed: 2015-04-29
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Inter-Electrode Gap Variation Methods for Compensating Deposition Non-Uniformity