Patent Assignment
Reel/Frame 036153/0834
Assignment of Assignor's Interest
Recorded: 2015-07-22
Pages: 6
Assignors
CHANDRASEKHARAN, RAMESH
Executed: 2015-07-15
O'LOUGHLIN, JENNIFER
Executed: 2015-07-15
SANGPLUNG, SAANGRUT
Executed: 2015-07-15
SWAMINATHAN, SHANKAR
Executed: 2015-07-15
PASQUALE, FRANK
Executed: 2015-07-15
BALDASSERONI, CHLOE
Executed: 2015-07-16
LAVOIE, ADRIEN
Executed: 2015-07-20
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods Enabling Low Defect Processing via Controlled Separation and Delivery of Chemicals During Atomic Layer Deposition