Patent Assignment
Reel/Frame 036158/0163
Assignment of Assignor's Interest
Recorded: 2015-07-22
Pages: 4
Assignors
KANOME, ATSUSHI
Executed: 2015-04-01
UKIGAYA, NOBUTAKA
Executed: 2015-04-02
HARA, KOJI
Executed: 2015-04-01
YOSHIZAKI, SATOSHI
Executed: 2015-04-04
KONDO, MASAHIKO
Executed: 2015-04-03
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Semiconductor Device Manufacturing Method and Resist Pattern Forming Method