Patent Assignment
Reel/Frame 036172/0052
Assignment of Assignor's Interest
Recorded: 2015-07-24
Pages: 6
Assignors
TANG, WEI
Executed: 2015-04-24
PARK, JASON DAEJIN
Executed: 2015-04-24
VAN SCHRAVENDIJK, BART J.
Executed: 2015-07-07
WANG, SHU TSAI
Executed: 2015-04-24
ASHTIANI, KAIHAN ABIDI
Executed: 2015-04-24
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Gap Fill Using Carbon-Based Films
Application:
14/692,627 →
Publication:
US 2016/0314964