Patent Assignment
Reel/Frame 036175/0140
Assignment of Assignor's Interest
Recorded: 2015-07-24
Pages: 5
Assignors
ASAKAWA, YUJI
Executed: 2015-07-07
MIDORIKAWA, YOHEI
Executed: 2015-07-07
TODA, SATOSHI
Executed: 2015-07-07
TAKAHASHI, HIROYUKI
Executed: 2015-07-07
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method