Patent Assignment
Reel/Frame 036177/0499
Assignment of Assignor's Interest
Recorded: 2015-07-24
Pages: 2
Assignors
MUELLER, JUERGEN
Executed: 2013-11-14
SCHICKETANZ, THOMAS
Executed: 2013-11-12
EHM, DIRK HEINRICH
Executed: 2013-11-15
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method for Correcting the Surface Form of a Mirror