Patent Assignment
Reel/Frame 036177/0830
Assignment of Assignor's Interest
Recorded: 2015-07-24
Pages: 4
Assignors
INOUE, KOUICHI
Executed: 2014-04-04
MAEDA, KAZUYOSHI
Executed: 2014-04-07
SHIBUYA, NORIHITO
Executed: 2014-04-07
Assignee
SINTOKOGIO, LTD.
11-11, NISHIKI 1-CHOME, NAKA-KU, NAGOYA-SHI, AICHI, 460-0003, JAPAN
Covered Property
(1)
Warp Correction Device and Warp Correction Method for Semiconductor Element Substrate