Patent Assignment
Reel/Frame 036187/0698
Assignment of Assignor's Interest
Recorded: 2015-07-27
Pages: 5
Assignors
GOMI, ATSUSHI
Executed: 2015-07-08
NAKAMURA, KANTO
Executed: 2015-07-08
KITADA, TOORU
Executed: 2015-07-08
SUZUKI, YASUNOBU
Executed: 2015-07-08
FURUKAWA, SHINJI
Executed: 2015-07-08
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Forming Apparatus and Film Forming Method