Patent Assignment
Reel/Frame 036232/0927
Assignment of Assignor's Interest
Recorded: 2015-07-31
Pages: 6
Assignors
KUMAR, PURUSHOTTAM
Executed: 2015-07-29
LAVOIE, ADRIEN
Executed: 2015-07-28
NGUYEN, TUAN
Executed: 2015-07-28
KANG, HU
Executed: 2015-07-29
QIAN, JUN
Executed: 2015-07-29
WANG, YE
Executed: 2015-07-29
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Multi-Cycle Ald Process for Film Uniformity and Thickness Profile Modulation