Patent Assignment
Reel/Frame 036247/0432
Assignment of Assignor's Interest
Recorded: 2015-08-04
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Operating Substrate Processing Apparatus, and Storage Medium