Patent Assignment
Reel/Frame 036264/0770
Assignment of Assignor's Interest
Recorded: 2015-08-06
Pages: 8
Assignors
KOO, BON-WOONG
Executed: 2015-07-30
LIKHANSKII, ALEXANDRE
Executed: 2015-08-03
RADOVANOV, SVETLANA B.
Executed: 2015-08-03
RENAU, ANTHONY
Executed: 2015-07-30
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
High Brightness Ion Beam Extraction Using Bias Electrodes and Magnets Proximate the Extraction Aperture