Patent Assignment
Reel/Frame 036275/0847
Assignment of Assignor's Interest
Recorded: 2015-08-07
Pages: 3
Assignor
LIU, PENG
Executed: 2013-04-02
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
A Lithography Model for Three-Dimensional Patterning Device